Physical and electrical characterization of high-k ZrO2 metal–insulator–metal capacitor

Published 2008 View Full Article

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Title
Physical and electrical characterization of high-k ZrO2 metal–insulator–metal capacitor
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 23, Pages 8333-8336
Publisher
Elsevier BV
Online
2008-04-13
DOI
10.1016/j.tsf.2008.03.051

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