On the kinetics of spatial atomic layer deposition

Atomic-scale simulation of ALD chemistry

(2012) Simon D Elliott   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

(2011) A. Illiberi et al.   ACS Applied Materials & Interfaces

Effect of temperature and gas velocity on growth per cycle during Al2O3 and ZnO atomic layer deposition at atmospheric pressure

(2011) Moataz Bellah M. Mousa et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Continuous atomic layer deposition: Explanation for anomalous growth rate effects

(2011) Philipp S. Maydannik et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatially separated atomic layer deposition of Al2O3, a new option for high-throughput Si solar cell passivation

(2011) B. Vermang et al.   PROGRESS IN PHOTOVOLTAICS

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

(2010) Paul Poodt et al.   ADVANCED MATERIALS

Very low surface recombination velocities on p- and n-type c-Si by ultrafast spatial atomic layer deposition of aluminum oxide

(2010) Florian Werner et al.   APPLIED PHYSICS LETTERS