Combination of characterization techniques for atomic layer deposition MoO3 coatings: From the amorphous to the orthorhombic α-MoO3 crystalline phase

In Situ Reaction Mechanism Studies on Ozone-Based Atomic Layer Deposition of Al2O3 and HfO2

(2010) Martin Rose et al.   ACS Applied Materials & Interfaces

In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Sb2Te3and GeTe from (Et3Si)2Te and Chlorides

(2010) Kjell Knapas et al.   CHEMISTRY OF MATERIALS

Growth of thin films of molybdenum oxide by atomic layer deposition

(2010) Madeleine Diskus et al.   JOURNAL OF MATERIALS CHEMISTRY

Infrared and near-infrared spectroscopic probing of atomic layer deposition processes

(2010) A. O’Mahony et al.   JOURNAL OF MOLECULAR STRUCTURE

Gas effects on the chemical and structural characeristics of porous MoO3 and MoO3−x grown by vapor condensation in helium and hydrogen

(2010) D.E. Diaz-Droguett et al.   MATERIALS CHEMISTRY AND PHYSICS

Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

(2008) David N. Goldstein et al.   Journal of Physical Chemistry C

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

(2008) Hyungjun Kim et al.   THIN SOLID FILMS