Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition

Ultralow Dielectric Constant Tetravinyltetramethylcyclotetrasiloxane Films Deposited by Initiated Chemical Vapor Deposition (iCVD)

(2010) Nathan J. Trujillo et al.   ADVANCED FUNCTIONAL MATERIALS

Mechanical Properties of Ultrahigh Molecular Weight PHEMA Hydrogels Synthesized Using Initiated Chemical Vapor Deposition

(2010) Ranjita K. Bose et al.   BIOMACROMOLECULES

Shape Memory Polymer Thin Films Deposited by Initiated Chemical Vapor Deposition

(2010) Nicolaas J. Kramer et al.   MACROMOLECULES

Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones

(2010) Anna Maria Coclite et al.   Plasma Processes and Polymers

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Transition between kinetic and mass transfer regimes in the initiated chemical vapor deposition from ethylene glycol diacrylate

(2009) Gozde Ozaydin-Ince et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Incorporation of Linear Spacer Molecules in Vapor-Deposited Silicone Polymer Thin Films

(2009) Anil Kumar H. Achyuta et al.   MACROMOLECULES

Flexible Cross-Linked Organosilicon Thin Films by Initiated Chemical Vapor Deposition

(2009) Anna Maria Coclite et al.   MACROMOLECULES

HWCVD of polymers: Commercialization and scale-up

(2009) Hilton G. Pryce Lewis et al.   THIN SOLID FILMS

Initiated Chemical Vapor Deposition (iCVD) of Conformal Polymeric Nanocoatings for the Surface Modification of High-Aspect-Ratio Pores

(2008) Malancha Gupta et al.   CHEMISTRY OF MATERIALS

In situ spectroscopic ellipsometry growth studies on the Al-doped ZnO films deposited by remote plasma-enhanced metalorganic chemical vapor deposition

(2008) I. Volintiru et al.   JOURNAL OF APPLIED PHYSICS

Optical and chemical characterization of expanding thermal plasma-deposited carbon-containing silicon dioxide-like films

(2008) M. Creatore et al.   THIN SOLID FILMS