Dielectric performance of hybrid alumina-silicone nanolaminates synthesized by plasma enhanced chemical vapor deposition
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Title
Dielectric performance of hybrid alumina-silicone nanolaminates synthesized by plasma enhanced chemical vapor deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 6, Pages 061508
Publisher
American Vacuum Society
Online
2011-10-22
DOI
10.1116/1.3652918
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