High-Deposition-Rate Atomic Layer Deposition of Thulium Oxide from TmCp3and H2O

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Tm3+ doped silicon thin film and waveguides for mid-infrared sources

(2012) Matthew Murray et al.   APPLIED PHYSICS LETTERS

Ultimate Scaling of High-κ Gate Dielectrics: Higher-κ or Interfacial Layer Scavenging?

(2012) Takashi Ando   Materials

Rare Earth Oxide Capping Effect on La$_{2}$O$_{3}$ Gate Dielectrics for Equivalent Oxide Thickness Scaling toward 0.5 nm

(2011) Miyuki Kouda et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Competing Mechanisms in Atomic Layer Deposition of Er2O3versus La2O3from Cyclopentadienyl Precursors

(2009) Michael Nolan et al.   CHEMISTRY OF MATERIALS

High-k Tm2O3 Sensing Membrane-Based Electrolyte−Insulator−Semiconductor for pH Detection

(2009) Tung-Ming Pan et al.   Journal of Physical Chemistry C

Impact of Precursor Chemistry and Process Conditions on the Scalability of ALD HfO[sub 2] Gate Dielectrics

(2009) Johan Swerts et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Structural and luminescent properties of Er-doped ZnO films grown by metalorganic chemical vapor deposition

(2009) Yoshikazu Terai et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B