Rare Earth Oxide Capping Effect on La$_{2}$O$_{3}$ Gate Dielectrics for Equivalent Oxide Thickness Scaling toward 0.5 nm

Title
Rare Earth Oxide Capping Effect on La$_{2}$O$_{3}$ Gate Dielectrics for Equivalent Oxide Thickness Scaling toward 0.5 nm
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 10, Pages 10PA04
Publisher
Japan Society of Applied Physics
Online
2011-10-24
DOI
10.1143/jjap.50.10pa04

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