Hard X-rays and soft-matter: processing of sol–gel films from a top down route
Published 2013 View Full Article
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Title
Hard X-rays and soft-matter: processing of sol–gel films from a top down route
Authors
Keywords
Sol–gel, Films, Lithography, Self-assembly, Mesoporous, Deep X-ray, Microfabrication
Journal
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
Volume 70, Issue 2, Pages 236-244
Publisher
Springer Nature
Online
2013-12-07
DOI
10.1007/s10971-013-3227-y
References
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