Densification of sol–gel silica thin films induced by hard X-rays generated by synchrotron radiation

Writing Self-Assembled Mesostructured Films with In situ Formation of Gold Nanoparticles

(2010) Luca Malfatti et al.   CHEMISTRY OF MATERIALS

Deep X-ray Lithography for Direct Patterning of PECVD Films

(2010) Stefano Costacurta et al.   Plasma Processes and Polymers

Patterning block copolymer thin films by deep X-ray lithography

(2010) Plinio Innocenzi et al.   Soft Matter

Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step

(2009) Paolo Falcaro et al.   ADVANCED MATERIALS

Hierarchical Porous Silica Films with Ultralow Refractive Index

(2009) Paolo Falcaro et al.   CHEMISTRY OF MATERIALS

X-rays to study, induce, and pattern structures in sol–gel materials

(2009) Paolo Falcaro et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY

Fabrication of Mesoporous Functionalized Arrays by Integrating Deep X-Ray Lithography with Dip-Pen Writing

(2008) Paolo Falcaro et al.   ADVANCED MATERIALS

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

(2008) Pascal Meyer et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Design of hybrid sol–gel films for direct x-ray and electron beam nanopatterning

(2008) Giovanna Brusatin et al.   NANOTECHNOLOGY