Metal-assisted chemical etching for very high aspect ratio grooves inn-type silicon wafers

Uniform Vertical Trench Etching on Silicon with High Aspect Ratio by Metal-Assisted Chemical Etching Using Nanoporous Catalysts

(2013) Liyi Li et al.   ACS Applied Materials & Interfaces

Role of catalyst concentration on metal assisted chemical etching of silicon

(2013) J. Cichoszewski et al.   ELECTROCHIMICA ACTA

Mechanism of nanowire formation in metal assisted chemical etching

(2013) Zachary R. Smith et al.   ELECTROCHIMICA ACTA

Deep and vertical silicon bulk micromachining using metal assisted chemical etching

(2013) Mohammad Zahedinejad et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Model for the Mass Transport during Metal-Assisted Chemical Etching with Contiguous Metal Films As Catalysts

(2012) Nadine Geyer et al.   Journal of Physical Chemistry C

Magnetically Guided Nano–Micro Shaping and Slicing of Silicon

(2012) Young Oh et al.   NANO LETTERS

Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

(2012) Prayudi Lianto et al.   Nanoscale

Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires

(2012) Karthik Balasundaram et al.   NANOTECHNOLOGY

Metal assisted chemical etching for high aspect ratio nanostructures: A review of characteristics and applications in photovoltaics

(2011) Xiuling Li   CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE

Fabrication of Silicon Nanowires with Precise Diameter Control Using Metal Nanodot Arrays as a Hard Mask Blocking Material in Chemical Etching

(2010) Jinquan Huang et al.   CHEMISTRY OF MATERIALS

High aspect ratio silicon etch: A review

(2010) Banqiu Wu et al.   JOURNAL OF APPLIED PHYSICS

Oxidation Rate Effect on the Direction of Metal-Assisted Chemical and Electrochemical Etching of Silicon

(2010) Zhipeng Huang et al.   Journal of Physical Chemistry C

Nonlithographic Patterning and Metal-Assisted Chemical Etching for Manufacturing of Tunable Light-Emitting Silicon Nanowire Arrays

(2010) Winston Chern et al.   NANO LETTERS

Optical Characterization of High-Order 1-D Silicon Photonic Crystals

(2009) G. Barillaro et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Ordered Arrays of Vertically Aligned [110] Silicon Nanowires by Suppressing the Crystallographically Preferred Etching Directions

(2009) Zhipeng Huang et al.   NANO LETTERS