Fabrication of nanoplate resonating structures via micro-masonry

A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

(2013) B.D. Hauer et al.   ANNALS OF PHYSICS

Ultra-thin free-standing single crystalline silicon membranes with strain control

(2013) A. Shchepetov et al.   APPLIED PHYSICS LETTERS

Micro-Masonry of MEMS Sensors and Actuators

(2013) Yong Zhang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Transfer Printing Techniques for Materials Assembly and Micro/Nanodevice Fabrication

(2012) Andrew Carlson et al.   ADVANCED MATERIALS

Electrostatically driven collapsible Au thin films assembled using transfer printing for thermal switching

(2012) Hohyun Keum et al.   APPLIED PHYSICS LETTERS

Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

(2012) V. P. Adiga et al.   JOURNAL OF APPLIED PHYSICS

Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication

(2012) Hohyun Keum et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Arrays of nanoelectromechanical biosensors functionalized by microcontact printing

(2012) S Salomon et al.   NANOTECHNOLOGY

Biosensor platform based on stress-improved piezoelectric membrane

(2012) Xu Lu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Modal dependence of dissipation in silicon nitride drum resonators

(2011) V. P. Adiga et al.   APPLIED PHYSICS LETTERS

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media

(2010) T Alava et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing

(2010) S. Kim et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Detachment Lithography of Photosensitive Polymers: A Route to Fabricating Three-Dimensional Structures

(2009) Junghoon Yeom et al.   ADVANCED FUNCTIONAL MATERIALS

Stress and Silicon Nitride: A Crack in the Universal Dissipation of Glasses

(2009) D. R. Southworth et al.   PHYSICAL REVIEW LETTERS

A biofunctional polymeric coating for microcantilever molecular recognition

(2008) Giulio Oliviero et al.   ANALYTICA CHIMICA ACTA

Micro-machined piezoelectric membrane-based immunosensor array

(2008) Ting Xu et al.   BIOSENSORS & BIOELECTRONICS

Damping Models for Microcantilevers, Bridges, and Torsional Resonators in the Free-Molecular-Flow Regime

(2008) M.J. Martin et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Biomolecular detection with a thin membrane transducer

(2008) Misun Cha et al.   LAB ON A CHIP