Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication

Published 2012 View Full Article

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Title
Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 5, Pages 055018
Publisher
IOP Publishing
Online
2012-04-17
DOI
10.1088/0960-1317/22/5/055018

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