Micro-Masonry of MEMS Sensors and Actuators

Published 2013 View Full Article

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Title
Micro-Masonry of MEMS Sensors and Actuators
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 2, Pages 308-314
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-07-30
DOI
10.1109/jmems.2013.2273439

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