Modal dependence of dissipation in silicon nitride drum resonators

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High-QNanomechanics via Destructive Interference of Elastic Waves

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(2010) Quirin P. Unterreithmeier et al.   PHYSICAL REVIEW LETTERS

Stress and Silicon Nitride: A Crack in the Universal Dissipation of Glasses

(2009) D. R. Southworth et al.   PHYSICAL REVIEW LETTERS

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(2009) D. J. Wilson et al.   PHYSICAL REVIEW LETTERS

A megahertz nanomechanical resonator with room temperature quality factor over a million

(2008) Scott S. Verbridge et al.   APPLIED PHYSICS LETTERS

High quality mechanical and optical properties of commercial silicon nitride membranes

(2008) B. M. Zwickl et al.   APPLIED PHYSICS LETTERS

Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane

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Intrinsic dissipation in nanomechanical resonators due to phonon tunneling

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