Formation of three-dimensional Parylene C structures via thermoforming
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Title
Formation of three-dimensional Parylene C structures via thermoforming
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 6, Pages 065003
Publisher
IOP Publishing
Online
2014-04-25
DOI
10.1088/0960-1317/24/6/065003
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