Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures

Title
Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 5, Pages 1098-1108
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-08-04
DOI
10.1109/jmems.2011.2160935

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