标题
Formation of three-dimensional Parylene C structures via thermoforming
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 6, Pages 065003
出版商
IOP Publishing
发表日期
2014-04-25
DOI
10.1088/0960-1317/24/6/065003
参考文献
相关参考文献
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