The impact of annealing temperature and time on the electrical performance of Ti/Pt thin films

Title
The impact of annealing temperature and time on the electrical performance of Ti/Pt thin films
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 14, Pages 4564-4569
Publisher
Elsevier BV
Online
2010-02-24
DOI
10.1016/j.apsusc.2010.02.048

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