Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch applications
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Title
Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch applications
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 12, Pages 125018
Publisher
IOP Publishing
Online
2011-11-22
DOI
10.1088/0960-1317/21/12/125018
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