Fabrication and Characterization of Gate-All-Around Silicon Nanowires on Bulk Silicon

Published 2008 View Full Article

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Title
Fabrication and Characterization of Gate-All-Around Silicon Nanowires on Bulk Silicon
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume 7, Issue 6, Pages 733-744
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-11-07
DOI
10.1109/tnano.2008.2007215

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