Experimental validation of compact damping models of perforated MEMS devices

Published 2009 View Full Article

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Title
Experimental validation of compact damping models of perforated MEMS devices
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 15, Issue 8, Pages 1121-1128
Publisher
Springer Nature
Online
2009-02-16
DOI
10.1007/s00542-009-0793-6

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