Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect

Published 2008 View Full Article

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Title
Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect
Authors
Keywords
-
Journal
ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING
Volume 57, Issue 3, Pages 213-224
Publisher
Springer Nature
Online
2008-03-24
DOI
10.1007/s10470-008-9165-x

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