MOEMS deformable mirrors for focus control in vital microscopy

Title
MOEMS deformable mirrors for focus control in vital microscopy
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 10, Issue 2, Pages 023005
Publisher
SPIE-Intl Soc Optical Eng
Online
2011-04-29
DOI
10.1117/1.3574129

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