Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments

Published 2008 View Full Article

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Title
Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 7, Issue 2, Pages 021008
Publisher
SPIE-Intl Soc Optical Eng
Online
2008-05-01
DOI
10.1117/1.2911024

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