Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs
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Title
Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs
Authors
Keywords
BeO, high-<em class=EmphasisTypeItalic >k</em> dielectric, GaN, gate leakage, MOS
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 43, Issue 1, Pages 151-154
Publisher
Springer Nature
Online
2013-09-25
DOI
10.1007/s11664-013-2754-1
References
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- The significance of core-level electron binding energies on the proper analysis of InGaAs interfacial bonding
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- AlGaN/GaN MOS-HEMT With $\hbox{HfO}_{2}$ Dielectric and $\hbox{Al}_{2}\hbox{O}_{3}$ Interfacial Passivation Layer Grown by Atomic Layer Deposition
- (2008) Yuanzheng Yue et al. IEEE ELECTRON DEVICE LETTERS
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