Effects of H2O Pretreatment on the Capacitance–Voltage Characteristics of Atomic-Layer-Deposited Al2O3 on Ga-Face GaN Metal–Oxide–Semiconductor Capacitors
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Title
Effects of H2O Pretreatment on the Capacitance–Voltage Characteristics of Atomic-Layer-Deposited Al2O3 on Ga-Face GaN Metal–Oxide–Semiconductor Capacitors
Authors
Keywords
GaN, Al<sub>2</sub>O<sub>3</sub>, atomic layer deposition, interface states, traps, hysteresis, MOSCAP
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 42, Issue 1, Pages 33-39
Publisher
Springer Nature
Online
2012-10-06
DOI
10.1007/s11664-012-2246-8
References
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Note: Only part of the references are listed.- Interface states at the SiN/AlGaN interface on GaN heterojunctions for Ga and N-polar material
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- (2011) Andrew D. Carter et al. Applied Physics Express
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- (2011) Tetsuya Fujiwara et al. Applied Physics Express
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- Reduced surface leakage current and trapping effects in AlGaN/GaN high electron mobility transistors on silicon with SiN/Al2O3 passivation
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- High-Speed AlN/GaN MOS-HFETs With Scaled ALD $ \hbox{Al}_{2}\hbox{O}_{3}$ Gate Insulators
- (2011) A. L. Corrion et al. IEEE ELECTRON DEVICE LETTERS
- Low-Leakage-Current AlN/GaN MOSHFETs Using $ \hbox{Al}_{2}\hbox{O}_{3}$ for Increased 2DEG
- (2011) Tongde Huang et al. IEEE ELECTRON DEVICE LETTERS
- Performance Enhancement of Normally-Off Plasma-Assisted Atomic Layer Deposited Al2O3/GaN Metal–Oxide–Semiconductor Field-Effect Transistor with Postdeposition Annealing
- (2011) Jong-Bong Ha et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Comparative study of AlGaN/GaN metal–oxide–semiconductor heterostructure field-effect transistors with Al2O3 and HfO2 gate oxide
- (2011) Eiji Miyazaki et al. SOLID-STATE ELECTRONICS
- Influence of processing and annealing steps on electrical properties of InAlN/GaN high electron mobility transistor with Al2O3 gate insulation and passivation
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- Arsenic decapping and half cycle reactions during atomic layer deposition of Al2O3 on In0.53Ga0.47As(001)
- (2010) Byungha Shin et al. APPLIED PHYSICS LETTERS
- Threshold Voltage Control in $\hbox{Al}_{0.72} \hbox{Ga}_{0.28}\hbox{N/AlN/GaN}$ HEMTs by Work-Function Engineering
- (2010) Guowang Li et al. IEEE ELECTRON DEVICE LETTERS
- Improved two-dimensional electron gas transport characteristics in AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor with atomic layer-deposited Al2O3 as gate insulator
- (2009) Z. H. Liu et al. APPLIED PHYSICS LETTERS
- Gate-First AlGaN/GaN HEMT Technology for High-Frequency Applications
- (2009) O.I. Saadat et al. IEEE ELECTRON DEVICE LETTERS
- Atomically abrupt and unpinned Al2O3/In0.53Ga0.47As interfaces: Experiment and simulation
- (2009) Eun Ji Kim et al. JOURNAL OF APPLIED PHYSICS
- Photoassisted high-frequency capacitance-voltage characterization of the Si3N4/GaN interface
- (2009) B. L. Swenson et al. JOURNAL OF APPLIED PHYSICS
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