Effects of H2O Pretreatment on the Capacitance–Voltage Characteristics of Atomic-Layer-Deposited Al2O3 on Ga-Face GaN Metal–Oxide–Semiconductor Capacitors

Title
Effects of H2O Pretreatment on the Capacitance–Voltage Characteristics of Atomic-Layer-Deposited Al2O3 on Ga-Face GaN Metal–Oxide–Semiconductor Capacitors
Authors
Keywords
GaN, Al<sub>2</sub>O<sub>3</sub>, atomic layer deposition, interface states, traps, hysteresis, MOSCAP
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 42, Issue 1, Pages 33-39
Publisher
Springer Nature
Online
2012-10-06
DOI
10.1007/s11664-012-2246-8

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