Growth characteristics and film properties of gallium doped zinc oxide prepared by atomic layer deposition
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Title
Growth characteristics and film properties of gallium doped zinc oxide prepared by atomic layer deposition
Authors
Keywords
Atomic layer deposition, Ga doped ZnO, Transparent Conduction Oxide (TCO), Gallium isopropoxide
Journal
JOURNAL OF ELECTROCERAMICS
Volume 31, Issue 3-4, Pages 338-344
Publisher
Springer Nature
Online
2013-08-03
DOI
10.1007/s10832-013-9848-2
References
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