MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam

Title
MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam
Authors
Keywords
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Journal
JOURNAL OF ELECTROCERAMICS
Volume 26, Issue 1-4, Pages 14-22
Publisher
Springer Nature
Online
2010-10-20
DOI
10.1007/s10832-010-9621-8

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