Modeling, fabrication and stress compensation of an epitaxial thin film piezoelectric microscale energy scavenging device

Published 2009 View Full Article

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Title
Modeling, fabrication and stress compensation of an epitaxial thin film piezoelectric microscale energy scavenging device
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 9, Pages 095014
Publisher
IOP Publishing
Online
2009-08-27
DOI
10.1088/0960-1317/19/9/095014

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