The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting

Published 2008 View Full Article

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Title
The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 5, Pages 055017
Publisher
IOP Publishing
Online
2008-04-05
DOI
10.1088/0960-1317/18/5/055017

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