Influence of the SiO2 interlayer thickness on the density and polarity of charges in Si/SiO2/Al2O3 stacks as studied by optical second-harmonic generation
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Title
Influence of the SiO2 interlayer thickness on the density and polarity of charges in Si/SiO2/Al2O3 stacks as studied by optical second-harmonic generation
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 3, Pages 033708
Publisher
AIP Publishing
Online
2014-01-17
DOI
10.1063/1.4857075
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