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Title
Controlling the surface roughness of epitaxial SiC on silicon
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 20, Pages 203501
Publisher
AIP Publishing
Online
2014-05-24
DOI
10.1063/1.4879237
References
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Related references
Note: Only part of the references are listed.- Evidence of a highly compressed nanolayer at the epitaxial silicon carbide interface with silicon
- (2013) Francesca Iacopi et al. ACTA MATERIALIA
- Orientation-dependent stress relaxation in hetero-epitaxial 3C-SiC films
- (2013) Francesca Iacopi et al. APPLIED PHYSICS LETTERS
- Evolution of epitaxial graphene layers on 3C SiC/Si (111) as a function of annealing temperature in UHV
- (2013) B. Gupta et al. CARBON
- Electron mobility limited by surface and interface roughness scattering in AlxGa1−xN/GaN quantum wells
- (2013) Jian-Xia Wang et al. Chinese Physics B
- Site-Selective Epitaxy of Graphene on Si Wafers
- (2013) Hirokazu Fukidome et al. PROCEEDINGS OF THE IEEE
- Epitaxial graphene on single domain 3C-SiC(100) thin films grown on off-axis Si(100)
- (2012) A. Ouerghi et al. APPLIED PHYSICS LETTERS
- Smoothing of reaction sintered silicon carbide using plasma assisted polishing
- (2012) Hui Deng et al. CURRENT APPLIED PHYSICS
- Controls over Structural and Electronic Properties of Epitaxial Graphene on Silicon Using Surface Termination of 3C-SiC(111)/Si
- (2011) Hirokazu Fukidome et al. Applied Physics Express
- Large area and structured epitaxial graphene produced by confinement controlled sublimation of silicon carbide
- (2011) W. A. de Heer et al. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
- Growth of 3C–SiC on 150-mm Si(100) substrates by alternating supply epitaxy at 1000°C
- (2011) Li Wang et al. THIN SOLID FILMS
- Structural coherency of epitaxial graphene on 3C–SiC(111) epilayers on Si(111)
- (2010) A. Ouerghi et al. APPLIED PHYSICS LETTERS
- Graphene Synthesis on Cubic SiC/Si Wafers. Perspectives for Mass Production of Graphene-Based Electronic Devices
- (2010) Victor Yu. Aristov et al. NANO LETTERS
- Graphene transistors
- (2010) Frank Schwierz Nature Nanotechnology
- 100-GHz Transistors from Wafer-Scale Epitaxial Graphene
- (2010) Y.-M. Lin et al. SCIENCE
- Epitaxial graphene top-gate FETs on silicon substrates
- (2010) Hyun-Chul Kang et al. SOLID-STATE ELECTRONICS
- Practical Chemical Sensors from Chemically Derived Graphene
- (2009) Jesse D. Fowler et al. ACS Nano
- Effect of the miscut direction in (111) 3C-SiC film growth on off-axis (111)Si
- (2009) A. Severino et al. APPLIED PHYSICS LETTERS
- Heteroepitaxial growth of (111) 3C-SiC on (110) Si substrate by second order twins
- (2008) R. Anzalone et al. APPLIED PHYSICS LETTERS
- Universal Optical Conductance of Graphite
- (2008) A. B. Kuzmenko et al. PHYSICAL REVIEW LETTERS
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