Smoothing of reaction sintered silicon carbide using plasma assisted polishing

Title
Smoothing of reaction sintered silicon carbide using plasma assisted polishing
Authors
Keywords
-
Journal
CURRENT APPLIED PHYSICS
Volume 12, Issue -, Pages S24-S28
Publisher
Elsevier BV
Online
2012-04-08
DOI
10.1016/j.cap.2012.04.004

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