Control of silicon nanoparticle size embedded in silicon oxynitride dielectric matrix
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Title
Control of silicon nanoparticle size embedded in silicon oxynitride dielectric matrix
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 114, Issue 3, Pages 033528
Publisher
AIP Publishing
Online
2013-07-20
DOI
10.1063/1.4816042
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