Controlled fabrication of Si nanocrystals embedded in thin SiON layers by PPECVD followed by oxidizing annealing

Title
Controlled fabrication of Si nanocrystals embedded in thin SiON layers by PPECVD followed by oxidizing annealing
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 28, Pages 285605
Publisher
IOP Publishing
Online
2010-06-29
DOI
10.1088/0957-4484/21/28/285605

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