Control of silicon nanoparticle size embedded in silicon oxynitride dielectric matrix
出版年份 2013 全文链接
标题
Control of silicon nanoparticle size embedded in silicon oxynitride dielectric matrix
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 114, Issue 3, Pages 033528
出版商
AIP Publishing
发表日期
2013-07-20
DOI
10.1063/1.4816042
参考文献
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