Thermal conduction properties of Mo/Si multilayers for extreme ultraviolet optics

Title
Thermal conduction properties of Mo/Si multilayers for extreme ultraviolet optics
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 8, Pages 083504
Publisher
AIP Publishing
Online
2012-10-18
DOI
10.1063/1.4759450

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