Stress and texture development during sputtering of yttria, zirconia, and yttria stabilized zirconia films on Si substrates

Crystalline Oxides on Silicon

(2010) James W. Reiner et al.   ADVANCED MATERIALS

Effects of substrate temperatures on the crystallizations and microstructures of electron beam evaporation YSZ thin films

(2010) Hong-Hsin Huang et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Stress and microstructure evolution during growth of magnetron-sputtered low-mobility metal films: Influence of the nucleation conditions

(2010) A. Fillon et al.   THIN SOLID FILMS

Compressive Stress Generation in Sn Thin Films and the Role of Grain Boundary Diffusion

(2009) Jae Wook Shin et al.   PHYSICAL REVIEW LETTERS

Direct Evidence for Effects of Grain Structure on Reversible Compressive Deposition Stresses in Polycrystalline Gold Films

(2009) J. Leib et al.   PHYSICAL REVIEW LETTERS

Stress in Evaporated and Sputtered Thin Films – A Comparison

(2009) R. Koch   SURFACE & COATINGS TECHNOLOGY

Residual stress and microstructure of as-deposited and annealed, sputtered yttria-stabilized zirconia thin films

(2008) David J. Quinn et al.   JOURNAL OF MATERIALS RESEARCH

High-k/Ge MOSFETs for future nanoelectronics

(2008) Yoshiki Kamata   Materials Today

Influences of deposition rate and oxygen partial pressure on residual stress and microstructure of YSZ thin films

(2008) Qiling Xiao et al.   THIN SOLID FILMS