Residual stress and microstructure of as-deposited and annealed, sputtered yttria-stabilized zirconia thin films

Published 2008 View Full Article

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Title
Residual stress and microstructure of as-deposited and annealed, sputtered yttria-stabilized zirconia thin films
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS RESEARCH
Volume 23, Issue 03, Pages 609-618
Publisher
Cambridge University Press (CUP)
Online
2008-03-01
DOI
10.1557/jmr.2008.0077

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