A non-stationary model for high power impulse magnetron sputtering discharges
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Title
A non-stationary model for high power impulse magnetron sputtering discharges
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 10, Pages 103303
Publisher
AIP Publishing
Online
2011-11-21
DOI
10.1063/1.3656446
References
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Related references
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