Recent progress in MEMS electret generator for energy harvesting

Soft X-ray Charging Method for a Silicon Electret Condenser Microphone

(2010) Kei Hagiwara et al.   Applied Physics Express

Low-frequency two-dimensional resonators for vibrational micro energy harvesting

(2010) U Bartsch et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications

(2010) Yuji Suzuki et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations

(2010) Bin Yang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

1.6 V Nanogenerator for Mechanical Energy Harvesting Using PZT Nanofibers

(2010) Xi Chen et al.   NANO LETTERS

Properties of SiO2electret films charged by ion implantation for MEMS-based energy harvesting systems

(2009) U Mescheder et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Electrostatic micro power generation from low-frequency vibration such as human motion

(2009) Y Naruse et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Fabrication, characterization and modelling of electrostatic micro-generators

(2009) Daniel Hoffmann et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

(2009) P Basset et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

(2009) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Strategies for increasing the operating frequency range of vibration energy harvesters: a review

(2009) Dibin Zhu et al.   MEASUREMENT SCIENCE and TECHNOLOGY

Micropower energy harvesting

(2009) R.J.M. Vullers et al.   SOLID-STATE ELECTRONICS

PECVD SiO2/Si3N4 double layers electrets on glass substrate

(2008) Zhiyu Chen et al.   IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION

The development of a high-performance perfluorinated polymer electret and its application to micro power generation

(2008) Yoshihiko Sakane et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Parylene-based electret power generators

(2008) Hsi-wen Lo et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Characterization of different beam shapes for piezoelectric energy harvesting

(2008) Frank Goldschmidtboeing et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Energy Harvesting From Human and Machine Motion for Wireless Electronic Devices

(2008) P.D. Mitcheson et al.   PROCEEDINGS OF THE IEEE

Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters

(2007) M. Renaud et al.   SENSORS AND ACTUATORS A-PHYSICAL