A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations

A Silicon MEMS DC/DC Converter for Autonomous Vibration-to-Electrical-Energy Scavenger

(2009) A.M. Paracha et al.   IEEE ELECTRON DEVICE LETTERS

Development of a thermoelectric energy harvester with thermal isolation cavity by standard CMOS process

(2009) S.M. Yang et al.   SENSORS AND ACTUATORS A-PHYSICAL

Theoretical comparison of the energy harvesting capability among various electrostatic mechanisms from structure aspect

(2009) Chengkuo Lee et al.   SENSORS AND ACTUATORS A-PHYSICAL

Small-scale energy harvesting through thermoelectric, vibration, and radiofrequency power conversion

(2008) Nicholas S. Hudak et al.   JOURNAL OF APPLIED PHYSICS

In-plane rotary comb-drive actuator for a variable optical attenuator

(2008) Jing-Yi Huang   Journal of Micro-Nanolithography MEMS and MOEMS

Energy harvesting from motion using rotating and gyroscopic proof masses

(2008) E M Yeatman   PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE

Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters

(2007) M. Renaud et al.   SENSORS AND ACTUATORS A-PHYSICAL

Power MEMS—A capacitive vibration-to-electrical energy converter with built-in voltage

(2007) Ingo Kuehne et al.   SENSORS AND ACTUATORS A-PHYSICAL

An electromagnetic micro power generator for wideband environmental vibrations

(2007) Ibrahim Sari et al.   SENSORS AND ACTUATORS A-PHYSICAL

Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

(2007) Till Huesgen et al.   SENSORS AND ACTUATORS A-PHYSICAL