A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

Title
A batch-fabricated and electret-free silicon electrostatic vibration energy harvester
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 11, Pages 115025
Publisher
IOP Publishing
Online
2009-10-13
DOI
10.1088/0960-1317/19/11/115025

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