A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications

Published 2010 View Full Article

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Title
A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 10, Pages 104002
Publisher
IOP Publishing
Online
2010-09-15
DOI
10.1088/0960-1317/20/10/104002
References
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