Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry

Published 2009 View Full Article

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Title
Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 57, Issue 3, Pages 1120-1126
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-12-01
DOI
10.1109/tie.2009.2036645
References
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