Article
Chemistry, Analytical
Zhoujing Ye, Ya Wei, Biyu Yang, Linbing Wang
Summary: This paper develops a printed circuit board with three MEMS accelerometer chips for pavement vibration monitoring. The sensing performance of the three MEMS accelerometer chips, including sensitivity, linearity, noise, resolution, frequency response, and temperature drift, was experimentally tested and compared. The results show that the VS1002 has the highest sensitivity and resolution with the best overall performance. This research is important for the development of high-precision and long-life acceleration sensors for pavement vibration monitoring.
Article
Engineering, Electrical & Electronic
Cheng Li, Bo Yang, Xiang Zheng, Zhenyu Sun, Luqiang Zhou, Xin Huang, Xin Guo
Summary: This work presents the development of a force-rebalanced micro-optics accelerometer using interferometry. The device achieves force feedback control through a grating-based MEMS interferometer and a soft robber magnet. It demonstrates improved performance and compact size, making it highly applicable for microseismic observations in confined environments.
IEEE SENSORS JOURNAL
(2022)
Article
Chemistry, Analytical
Joon Hyong Cho, David Cayll, Dipankar Behera, Michael Cullinan
Summary: The demand for graphene-based devices is rapidly growing, but there are significant challenges in the manufacturing process. Despite recent breakthroughs in basic research, integrating graphene with Micro-Nano Electromechanical Systems remains challenging. Therefore, achieving large-scale, repeatable production is still a major barrier to the commercialization of graphene.
Article
Materials Science, Multidisciplinary
Minhui Yu, Mei Sang, Cheng Guo, Ruifeng Zhang, Fan Zhao, Hongguang Liu, Tiegen Liu
Summary: A high-frequency short-pulsed stroboscopic micro-visual system was used to capture transient image sequences of periodically in-plane MEMS devices, with the developed SURF-based FPM algorithm for demodulating motion parameters. The performance evaluation using a MEMS gyroscope showed that the SURF-based FPM method achieved significantly higher velocity demodulation precision compared to traditional algorithms.
MICROSCOPY AND MICROANALYSIS
(2022)
Article
Optics
Guowei Yang, Yizhong Wang
Summary: The 3D measurement of micro-sized components using Fringe projection profilometry (FFP) with high spatial resolution fringe patterns generated by a MEMS scanning module is effective in accurately measuring tiny height changes and presenting the measured components with high precision. This method has a promising prospect for the 3D measurement of micro-sized components.
OPTICS AND LASER TECHNOLOGY
(2021)
Article
Acoustics
Martin Chan, Christian Baker, Daniel Simmons, Mike Goldsmith
Summary: The demand for precision grade MEMSM microphones is rapidly increasing, requiring a reliable and cost-efficient bulk calibration method. This paper presents a pilot version of such a method carried out at the National Physical Laboratory in the UK. The method shows promise as a basis for bulk calibration of precision MEMSMs.
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
(2021)
Review
Green & Sustainable Science & Technology
Salman Tariq, Zhongyu Hu, Tarek Zayed
Summary: This study investigates real-time monitoring of water networks using MEMS technologies. Through scientometric analysis and qualitative discussions, research trends and future opportunities in different technologies are identified, providing researchers with valuable insights into leak detection and localization techniques.
JOURNAL OF CLEANER PRODUCTION
(2021)
Article
Engineering, Mechanical
Eldar Rahimov, Michael Watson, Andreas Hadjisoteriou, Matthew Marshall
Summary: This article focuses on the characterization of blade wear behavior in contacts between Ti (6Al 4V) blades and AlSi-polyester abradables. Three abrasion tests were performed on a new test rig developed at the University of Sheffield. The results show that adhesions on the blade surface wear off gradually at a lower incursion rate and fracture at a higher incursion rate. The developed front-on imaging system allows for further investigation on the rub performance of blades with different tip geometry.
Article
Physics, Applied
Shasha Zhou, Rongmin Zhang, Jinwei Qiao, Anqing Li, Shenjie Zhou
Summary: A new model for a bilayered transversely isotropic piezoelectric rectangular micro-plate with a distributed load is developed to analyze the piezoelectric micromachined ultrasonic transducer. The model accounts for the surface effect and flexoelectricity effect and investigates the size-dependent electromechanical coupling behaviors. The results show that the normalized central deflection decreases as residual surface stress increases, with the surface effect being the main influencing factor for negative residual stress and flexoelectric effect becoming more crucial for positive residual stress when the thickness-to-length ratio exceeds approximately 25. Moreover, a stronger size dependence is observed for electrical potential and polarization when the thickness of the piezoelectric layer is less than about 40 nm.
JOURNAL OF APPLIED PHYSICS
(2022)
Article
Optics
Frantisek Kavan, Pavel Psota, Marek Mach, Marek Stasik, Vit Ledl
Summary: This paper discusses the dependence of the precision of digital holographic methods on measurement parameters, focusing on factors such as illumination intensity, surface microroughness, measurement geometry, and object shape. After parameter optimization, digital holographic methods can be advantageously used for ground surface measurements in optical workshops.
Article
Optics
Ronggang Zhu, Jianjie Zhou, Bo Li, Ya Huang
Summary: An iterative algorithm is proposed in this paper to effectively eliminate the periodic ripple error in measurement results of dynamic interferometers, improving measurement accuracy without the need for additional manual operation.
Article
Multidisciplinary Sciences
Xun Wang, Tiefeng Peng, Pingbo Wu, Litong Cui
Summary: This study established an electro-mechanical coupling dynamic model for rail transit vehicles and quantitatively analyzed the dynamic responses of different vehicle components. The results showed that traction force had almost no effect on vibration acceleration in the low frequency domain.
SCIENTIFIC REPORTS
(2021)
Article
Optics
Mirai Iimori, Ya Zhang
Summary: In this study, we report the two-dimensional measurement of resonance in MEMS resonators using stroboscopic differential interference contrast (DIC) microscopy. The DIC microscopy enables the observation of large-amplitude nonlinear oscillations and provides high vertical resolution and a large measurement range. This research is significant for the investigation of linear and nonlinear oscillations of MEMS resonators.
Article
Engineering, Electrical & Electronic
Peiji Sun, Xuan She, Junjie Yao, Kan Chen, Ran Bi, Lei Wang, Xiaowu Shu
Summary: This paper presents a monolithic integrated micro-opto-electromechanical system (MOEMS) accelerometer based on the Michelson interferometer structure, with high precision, large measurement range, and small size, which may pave the way for applications in civil, industrial, and military fields.
JOURNAL OF LIGHTWAVE TECHNOLOGY
(2022)
Article
Physics, Applied
Meiyong Liao, Liwen Sang, Huanying Sun, Tiefu Li, Satoshi Koizumi
Summary: This paper presents an efficient metal-oxide-semiconductor actuator with low power dissipation, low voltage operation, and adjustable amplitude, which can be universally applied to all semiconductors compatible with complementary metal-oxide-semiconductor technology.
APPLIED PHYSICS LETTERS
(2021)
Article
Chemistry, Analytical
Liang-Chia Chen, Thanh-Hung Nguyen
Editorial Material
Chemistry, Multidisciplinary
Kuang-Chao Fan, Liang-Chia Chen
APPLIED SCIENCES-BASEL
(2019)
Article
Chemistry, Analytical
Duc-Hieu Duong, Chin-Sheng Chen, Liang-Chia Chen
Article
Chemistry, Multidisciplinary
Fu-Sheng Yang, Chao-Ching Ho, Liang-Chia Chen
Summary: An AOI system was developed for O-Ring inspection, achieving high detection accuracy for surface defects and size estimation.
APPLIED SCIENCES-BASEL
(2021)
Article
Optics
Guo-Wei Wu, Liang-Chia Chen
Summary: A novel method utilizing artificial neural network (ANN) and diffractive image microscopy (DIM) was proposed in this study, achieving precise measurement of surface height, inclined angle, and tilted direction. This approach does not require prior knowledge of neighboring geometric information.
OPTICS AND LASERS IN ENGINEERING
(2021)
Article
Optics
Hong-Ruei Chen, Liang-Chia Chen
Summary: This article introduces a quasi-area-scan chromatic confocal microscopy for full-field surface profilometry which achieves high precision, accuracy, and high-speed measurement without mechanical scanning. By combining electrically driven galvanometer with optical line-scan illumination and imaging modules, the proposed system can measure with a large field of view and high accuracy. Experimental results show measurement bias below 0.239 μm and a standard deviation of 0.126 μm, with a measuring speed exceeding 8000 lines/s when the Galvanometer reaches its design specifications.
OPTICS AND LASERS IN ENGINEERING
(2023)
Article
Engineering, Mechanical
Wei-Hsin Chein, Fu-Sheng Yang, Zi-Ying Fu, Liang-Chia Chen
Summary: This article presents an innovative model-based scatterometry method for CD metrology of single high-aspect-ratio (HAR) microstructures. The proposed system achieves high-precision single-structure measurement of fine-pitch HAR structures with significantly improved light efficiency. Experimental results demonstrate accurate measurement of RDL structures with fine nominal spacing as small as 1 μm and an aspect ratio of 3:1.
SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES
(2023)
Article
Optics
Wei-Hsin Chein, Fu-Sheng Yang, Komal Thakur, Guo-Wei Wu, Liang-Chia Chen
Summary: This work introduces a new optical metrology technique that enables accurate depth measurement of high-aspect-ratio multi-layer microstructures with high spatial resolution and signal-to-noise ratio. By optimizing light shaping using numerical-aperture controlled laser beams, the limitations of existing optical metrology techniques are overcome. Experimental tests show a 28-fold improvement in SNR for measuring large-depth structures compared to traditional broadband incoherent illumination. The developed optical measuring system allows for non-integral depth measurement of densely spaced microstructures, such as through-silicon vias and redistribution layers, with desired numerical aperture and field of view achieved simultaneously. The precision of depth measurement can be maintained within a few nanometers, as demonstrated by measuring a single submicron structure with a linewidth of 0.6 μm and an aspect ratio of 5.
OPTICS AND LASERS IN ENGINEERING
(2023)
Proceedings Paper
Engineering, Electrical & Electronic
Guo-Wei Wu, Liang-Chia Chen
Summary: A new optical surface measuring method based on artificial neural network is developed to enhance accuracy by introducing external optical aberration to a microscope, effectively avoiding the risk of ambiguity and achieving true three-dimensional surface reconstruction.
OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY II
(2022)
Proceedings Paper
Engineering, Electrical & Electronic
Wei-Hsin Chein, Fu-Sheng Yang, Komal Thakur, Guo-Wei Wu, Liang-Chia Chen
Summary: The article presents a novel optical metrology method for accurate measurement of critical dimensions (CD) of sub-micrometer structures with high spatial resolution and light efficiency. The method utilizes the spatially coherent nature of the supercontinuum laser to detect submicron-scale structures with high aspect ratios. Test results show that the measurement precision of the depth can be kept within a few nanometers for submicron structures with linewidths as small as 0.7 μm and aspect ratios over 4.
OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY II
(2022)
Review
Engineering, Multidisciplinary
Yuki Shimizu, Liang-Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, Hiraku Matsukuma
Summary: This article provides insights into optical measurement technologies for precision positioning and quality assessment in today's manufacturing industry. It also reviews state-of-the-art optical techniques such as optical coherence tomography and super-resolution techniques. These technologies are expected to become even more important for high-precision and high-efficiency machining in the industry.
MEASUREMENT SCIENCE AND TECHNOLOGY
(2021)
Article
Automation & Control Systems
Fan-Chun Kuo, Chekang Hsu, Meng-Ru Hsieh, Jia-Yush Yen, Liang-Chia Chen, Tien-Tung Chung, Fu-Cheng Wang
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2020)
Proceedings Paper
Engineering, Electrical & Electronic
Guo-Wei Wu, Ming-Jun Jiang, Liang-Chia Chen
APPLIED OPTICAL METROLOGY III
(2019)
Proceedings Paper
Engineering, Electrical & Electronic
Guo-Wei Wu, Ming-Jun Jiang, Liang-Chia Chen
APPLIED OPTICAL METROLOGY III
(2019)
Proceedings Paper
Engineering, Industrial
Johannes Belkner, Hsiu-Wen Liu, Eberhard Manske, Liang-Chia Chen
OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XI
(2019)
Article
Optics
Yin Xiao, Lina Zhou, Wen Chen
Summary: This paper introduces a correspondence imaging approach for reconstructing high-quality objects through complex scattering media. By deriving a rectified theory and introducing temporal correction, the proposed method eliminates the effect of dynamic scaling factors. Experimental results demonstrate the advantages of the proposed method over conventional methods in complex scattering environments, and it can also be combined with other methods to further enhance the quality of reconstructed objects.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Zengxuan Jiang, Minghao Chao, Qingsong Liu, Bo Cheng, Guofeng Song, Jietao Liu
Summary: In this paper, a multi-focal metalens with high focusing efficiency controlled by circular polarization multiplexing is demonstrated. The metalens can generate four transversely distributed focal points under normal incidence of linearly polarized light, supporting both left-circularly polarized and right-circularly polarized conversion. Furthermore, an oblique incidence metalens is designed to achieve high total focusing efficiency for terahertz waves and provides potential new applications for polarization imaging and detection.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Yiran Wang, Yu Ji, Xuyang Zhou, Xiu Wen, Yutong Li, Zhengjun Liu, Shutian Liu
Summary: This work presents a new reconstruction framework for structured illumination microscopy (SIM), which only requires four raw images and avoids extensive iterative computation. By using checkerboard pattern illumination modulation instead of sinusoidal fringe illumination, the proposed method significantly reduces image acquisition time and achieves higher image reconstruction rate. Additionally, the reconstruction process is non-iterative and not limited by the field of view size.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Qian He, Li Pei, Jianshuai Wang, Jingjing Zheng, Tigang Ning, Jing Li
Summary: This paper proposes a 3D refractive index profile visualization method to demonstrate mode activation and evolution in fiber fusion splicing. The method is validated through experimental results and provides support for various fiber splicing operations and mode coupling modulation.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Qiwei Li, Qiyu Wang, Fang Lu, Yang Cao, Xu Zhao
Summary: LSHIP is a lenslet-array-based snapshot hyperspectral imaging polarimeter that combines spectral polarization modulation with integral field imaging spectrometry. It can simultaneously acquire three-dimensional spatial and spectral data-cubes for linear Stokes parameters in a single snapshot.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Huicong Li, Bing Lv, Meng Tian, Wenzhu Huang, Wentao Zhang
Summary: This study proposes a temperature compensation scheme for unbalanced interferometers using sensing fibers with different temperature coefficients, aiming to resolve the temperature disturbance and achieve high strain resolution. The experimental results confirm the effectiveness of the proposed scheme in high-resolution, long-term, low-frequency, and static strain sensing.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Hongxiang Chang, Rongtao Su, Yuqiu Zhang, Bowang Shu, Jinhu Long, Jinyong Leng, Pu Zhou
Summary: High-speed variable-focus optics provides new opportunities for fiber laser applications in various fields. This paper investigates a non-mechanical axial focus tuning method using coherent beam combining (CBC) technique and proposes a tilt modulation assisted method to extend the tuning range.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Yubo Ni, Shuai Fu, Chaoyang Su, Zhaozong Meng, Nan Gao, Zonghua Zhang
Summary: This paper proposes a surface adaptive fringe pattern generation method to accurately measure specular surfaces, eliminating the out-of-focus effect and improving measurement accuracy and reliability.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Zifan Wang, Tianfeng Zhou, Qian Yu, Zihao Zeng, Xibin Wang, Junjian Hu, Jiyong Zeng
Summary: Fast-axis collimation (FAC) lens arrays are crucial in laser systems, and their precision can be improved through the development of an optical collimation system and the use of thermal compensation to correct for non-uniform thermal expansion.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Jincheng Chen, Qiuyu Fang, Li Huang, Xin Ye, Luhong Jin, Heng Zhang, Yinqian Luo, Min Zhu, Luhao Zhang, Baohua Ji, Xiang Tian, Yingke Xu
Summary: This study developed a novel deep learning accelerated SRRF method that enables super-resolution reconstruction with only 5 low SNR images, and allows real-time visualization of microtubule dynamics and interactions with CCPs.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Pan Liu, Yongqiang Zhao, Ning Li, Kai Feng, Seong G. Kong, Chaolong Tang
Summary: This article presents a technique for inverse design of multilayer deep-etched gratings (MDEG) using a deep neural network with adaptive solution space. The proposed method trains a deep neural network to predict the probability distribution across the discretized space, enabling evaluation of an optimal solution. The results show improved efficiencies using only a reduced dataset and avoiding one-to-many mapping challenges.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Evelina Bibikova, Nazar Al-wassiti, Nataliya Kundikova
Summary: Light beams possess three types of angular momentum, namely spin angular momentum, extrinsic orbital angular momentum, and intrinsic orbital angular momentum. The interaction between these momenta leads to the spin-orbit interaction of light and topological effects. This study predicts a new topological effect resulting from the influence of extrinsic orbital angular momentum on spin angular momentum in converging asymmetrical light beams. It manifests as the transformation of linear polarized light into elliptically polarized light when an asymmetrical beam passes through the left or right half of the focal plane. The measured value of the topological circular amplitude anisotropy R was found to be R = +/- (0.60 +/- 0.08) x 10(-3). This new effect contributes to our understanding of light and has potential applications in developing sensors in optics.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Hamdy H. Wahba
Summary: This study combines multiple-beam Fizeau interference and single-shot digital holographic interferometry to study thick phase objects. By collecting optical phase at different focal planes, the angular spectrum method is used for the first time to retrieve optical phase maps through the focal depth. The proposed method proves to be effective in providing accurate numerical focusing and phase maps reconstruction.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Mohammed A. Isa, Richard Leach, David Branson, Samanta Piano
Summary: Due to the complexity of resolving object form and pose in images, new vision algorithms prioritize identification and perception over accurate coordinate measurement. However, the use of planar targets for coordinate measurement in vision systems has several drawbacks, including calibration difficulties and limited viewing angles. On the other hand, the use of sphere targets is infrequent in vision-based coordinate metrology due to the lack of efficient multi-view vision algorithms for accurate sphere measurements.
OPTICS AND LASERS IN ENGINEERING
(2024)
Article
Optics
Ildar Rakhmatulin, Donald Risbridger, Richard M. Carter, M. J. Daniel Esser, Mustafa Suphi Erden
Summary: This paper reviews the application of machine learning in laser systems. While machine learning has been widely used in general control automation and adjustment tasks, its application in specific tasks requiring skilled workforces for high-precision equipment assembly and adjustment is still limited. The paper presents promising research directions for using machine learning in mirror positional adjustment, triangulation, and optimal laser parameter selection, based on the recommendations of PRISMA.
OPTICS AND LASERS IN ENGINEERING
(2024)
