Article
Engineering, Electrical & Electronic
Cheng Li, Bo Yang, Xiang Zheng, Zhenyu Sun, Luqiang Zhou, Xin Huang, Xin Guo
Summary: In this work, a portable MEMS accelerometer applicable to seismic-grade measurements has been fabricated and characterized. The accelerometer operates on a deformable grating-based MEMS interferometer, and employs a new MEMS out-of-plane sensing chip with low natural frequency and stress. The evaluation results of the fabricated prototype show high voltage sensitivity and noise performance, making it a promising device for seismic-grade applications.
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
(2022)
Article
Engineering, Electrical & Electronic
Cao Xia, Tong Liu, Na Ling, Jingru Liao, Yujie Wang, Zhuqing Wang
Summary: This study proposes a bridge resonator consisting of a microbeam and a functional composite membrane for gas detection. The gas molecules adsorbed onto the membrane induce compressive stress on the micro clamped-clamped beam, decreasing bending stiffness and increasing effective mass of the resonator. The resonant frequency shift of the proposed sensor shows higher gas sensitivity compared to those based only on mass or stiffness change.
IEEE SENSORS JOURNAL
(2023)
Article
Engineering, Electrical & Electronic
Alison E. Hake, Chuming Zhao, Wang-Kyung Sung, Karl Grosh
Summary: The study introduces a piezoelectric MEMS accelerometer designed for auditory prostheses, providing analytic models for sensitivity and noise to optimize sensor designs. An experimental device with high sensitivity and low input noise was tested, showing promising results for potential applications in auditory prostheses.
IEEE SENSORS JOURNAL
(2021)
Article
Chemistry, Analytical
Hao Yan, Xiaoping Liao, Chenglin Li, Chen Chen
Summary: This paper proposes an amplitude demodulator with a large dynamic range based on MEMS technology, utilizing a cascade of capacitive and thermoelectric sensors to demodulate AM signals with carrier frequencies ranging from 0.35 to 10 GHz. The device has high power handling capability and zero DC power consumption.
Article
Engineering, Mechanical
Eldar Rahimov, Michael Watson, Andreas Hadjisoteriou, Matthew Marshall
Summary: This article focuses on the characterization of blade wear behavior in contacts between Ti (6Al 4V) blades and AlSi-polyester abradables. Three abrasion tests were performed on a new test rig developed at the University of Sheffield. The results show that adhesions on the blade surface wear off gradually at a lower incursion rate and fracture at a higher incursion rate. The developed front-on imaging system allows for further investigation on the rub performance of blades with different tip geometry.
Article
Optics
Frantisek Kavan, Pavel Psota, Marek Mach, Marek Stasik, Vit Ledl
Summary: This paper discusses the dependence of the precision of digital holographic methods on measurement parameters, focusing on factors such as illumination intensity, surface microroughness, measurement geometry, and object shape. After parameter optimization, digital holographic methods can be advantageously used for ground surface measurements in optical workshops.
Article
Automation & Control Systems
Han Woong Yoo, Rene Riegler, David Brunner, Stephan Albert, Thomas Thurner, Georg Schitter
Summary: This article presents a vibration test method for evaluating the vibration immunity of a resonant MEMS scanning system used in automotive lidar applications. The energy variation analysis reveals the direction dependency of vibration coupling. Both experimental and simulation results verify the proposed vibration coupling mechanism of the MEMS mirror, and a controlled MEMS mirror using a phase locked loop (PLL) is shown to improve system performance.
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
(2022)
Article
Engineering, Electrical & Electronic
Kunfeng Wang, Xingyin Xiong, Zheng Wang, Bowen Wang, Liangbo Ma, Xudong Zou
Summary: This article presents a theoretical and experimental study of a weakly coupled resonant tilt sensor based on different output metrics. The sensor's sensitivity, linear range, stability, and noise analysis are investigated. Experimental results show that the sensor achieves high resolutions and the output based on amplitude difference has the best long-term stability, while the output based on mode frequency has better short-term stability. The output based on amplitude ratio balances sensitivity, linear range, and long-term stability.
IEEE SENSORS JOURNAL
(2023)
Article
Nanoscience & Nanotechnology
Liu Xu, Yonghong Qi, Zhuangde Jiang, Xueyong Wei
Summary: Synchronization, a unique phenomenon, has been extensively studied and applied in various fields. The narrow synchronization range is a major challenge for the wide application of synchronization-enhanced sensing mechanism. In this study, a frequency automatic tracking system is proposed to widen the synchronization range and track periodic acceleration signals. Experimental results show that the system achieves good performance on static and dynamic signals.
MICROSYSTEMS & NANOENGINEERING
(2022)
Article
Optics
Vyas Akondi, Bartlomiej Kowalski, Alfredo Dubra
Summary: Dynamic mirror deformation can degrade optical instrument performance, but high-frequency resonant scanners with low distortion, such as those made with silicon carbide or biaxial MEMS technology, show promise as alternatives.
Article
Engineering, Electrical & Electronic
Cheng Li, Bo Yang, Xiang Zheng, Zhenyu Sun, Luqiang Zhou, Xin Huang, Xin Guo
Summary: This work presents the development of a force-rebalanced micro-optics accelerometer using interferometry. The device achieves force feedback control through a grating-based MEMS interferometer and a soft robber magnet. It demonstrates improved performance and compact size, making it highly applicable for microseismic observations in confined environments.
IEEE SENSORS JOURNAL
(2022)
Article
Optics
Mirai Iimori, Ya Zhang
Summary: In this study, we report the two-dimensional measurement of resonance in MEMS resonators using stroboscopic differential interference contrast (DIC) microscopy. The DIC microscopy enables the observation of large-amplitude nonlinear oscillations and provides high vertical resolution and a large measurement range. This research is significant for the investigation of linear and nonlinear oscillations of MEMS resonators.
Article
Engineering, Electrical & Electronic
Zhenyu Sun, Cheng Li, Luqiang Zhou, Xin Huang, Bo Yang
Summary: This article presents the design of an electromagnetic feedback optical MEMS accelerometer with temperature control. The device consists of two single accelerometer chips assembled via manual microassembly. The electromagnetic feedback control system ensures linear operation, and the temperature control system maintains a stable operating temperature. Experimental results show that the device has high voltage sensitivity, wide dynamic range, low noise floor, and good bias stability. This device has significant potential in seismic and gravity measurements.
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
(2023)
Article
Chemistry, Analytical
Denisa Ficai, Marin Gheorghe, Georgiana Dolete, Bogdan Mihailescu, Paul Svasta, Anton Ficai, Gabriel Constantinescu, Ecaterina Andronescu
Summary: Microelectromechanical systems (MEMS) have wide applications in various fields such as high tech, energy, medicine, and environment. Magnetic polymer films are extensively used in the development of microvalves and micropumps, which are critical components of MEMS. Based on literature survey, various polymers and magnetic micro and nanopowders have been identified, and their performances can be adjusted from simple valves and pumps to biomimetic devices depending on their nature, ratio, processing route, and device design.
Article
Radiology, Nuclear Medicine & Medical Imaging
Micol Colella, Daniel Z. Press, Rebecca M. Laher, Courtney E. McIlduff, Seward B. Rutkove, Antonino M. Cassara, Francesca Apollonio, Alvaro Pascual-Leone, Micaela Liberti, Giorgio Bonmassar
Summary: Peripheral magnetic stimulation (PMS) is a complementary method to standard electrical stimulation (ES) that can stimulate sensory and motor nerve fibers without discomfort. In this study, a novel PMS coil was developed using flexible technologies and its effectiveness was validated through simulations and experiments.
Article
Chemistry, Analytical
Liang-Chia Chen, Thanh-Hung Nguyen
Editorial Material
Chemistry, Multidisciplinary
Kuang-Chao Fan, Liang-Chia Chen
APPLIED SCIENCES-BASEL
(2019)
Article
Chemistry, Multidisciplinary
Fu-Sheng Yang, Chao-Ching Ho, Liang-Chia Chen
Summary: An AOI system was developed for O-Ring inspection, achieving high detection accuracy for surface defects and size estimation.
APPLIED SCIENCES-BASEL
(2021)
Article
Optics
Guo-Wei Wu, Liang-Chia Chen
Summary: A novel method utilizing artificial neural network (ANN) and diffractive image microscopy (DIM) was proposed in this study, achieving precise measurement of surface height, inclined angle, and tilted direction. This approach does not require prior knowledge of neighboring geometric information.
OPTICS AND LASERS IN ENGINEERING
(2021)
Article
Optics
Hong-Ruei Chen, Liang-Chia Chen
Summary: This article introduces a quasi-area-scan chromatic confocal microscopy for full-field surface profilometry which achieves high precision, accuracy, and high-speed measurement without mechanical scanning. By combining electrically driven galvanometer with optical line-scan illumination and imaging modules, the proposed system can measure with a large field of view and high accuracy. Experimental results show measurement bias below 0.239 μm and a standard deviation of 0.126 μm, with a measuring speed exceeding 8000 lines/s when the Galvanometer reaches its design specifications.
OPTICS AND LASERS IN ENGINEERING
(2023)
Article
Engineering, Mechanical
Wei-Hsin Chein, Fu-Sheng Yang, Zi-Ying Fu, Liang-Chia Chen
Summary: This article presents an innovative model-based scatterometry method for CD metrology of single high-aspect-ratio (HAR) microstructures. The proposed system achieves high-precision single-structure measurement of fine-pitch HAR structures with significantly improved light efficiency. Experimental results demonstrate accurate measurement of RDL structures with fine nominal spacing as small as 1 μm and an aspect ratio of 3:1.
SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES
(2023)
Article
Optics
Wei-Hsin Chein, Fu-Sheng Yang, Komal Thakur, Guo-Wei Wu, Liang-Chia Chen
Summary: This work introduces a new optical metrology technique that enables accurate depth measurement of high-aspect-ratio multi-layer microstructures with high spatial resolution and signal-to-noise ratio. By optimizing light shaping using numerical-aperture controlled laser beams, the limitations of existing optical metrology techniques are overcome. Experimental tests show a 28-fold improvement in SNR for measuring large-depth structures compared to traditional broadband incoherent illumination. The developed optical measuring system allows for non-integral depth measurement of densely spaced microstructures, such as through-silicon vias and redistribution layers, with desired numerical aperture and field of view achieved simultaneously. The precision of depth measurement can be maintained within a few nanometers, as demonstrated by measuring a single submicron structure with a linewidth of 0.6 μm and an aspect ratio of 5.
OPTICS AND LASERS IN ENGINEERING
(2023)
Proceedings Paper
Engineering, Electrical & Electronic
Guo-Wei Wu, Liang-Chia Chen
Summary: A new optical surface measuring method based on artificial neural network is developed to enhance accuracy by introducing external optical aberration to a microscope, effectively avoiding the risk of ambiguity and achieving true three-dimensional surface reconstruction.
OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY II
(2022)
Proceedings Paper
Engineering, Electrical & Electronic
Wei-Hsin Chein, Fu-Sheng Yang, Komal Thakur, Guo-Wei Wu, Liang-Chia Chen
Summary: The article presents a novel optical metrology method for accurate measurement of critical dimensions (CD) of sub-micrometer structures with high spatial resolution and light efficiency. The method utilizes the spatially coherent nature of the supercontinuum laser to detect submicron-scale structures with high aspect ratios. Test results show that the measurement precision of the depth can be kept within a few nanometers for submicron structures with linewidths as small as 0.7 μm and aspect ratios over 4.
OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY II
(2022)
Review
Engineering, Multidisciplinary
Yuki Shimizu, Liang-Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, Hiraku Matsukuma
Summary: This article provides insights into optical measurement technologies for precision positioning and quality assessment in today's manufacturing industry. It also reviews state-of-the-art optical techniques such as optical coherence tomography and super-resolution techniques. These technologies are expected to become even more important for high-precision and high-efficiency machining in the industry.
MEASUREMENT SCIENCE AND TECHNOLOGY
(2021)
Article
Automation & Control Systems
Fan-Chun Kuo, Chekang Hsu, Meng-Ru Hsieh, Jia-Yush Yen, Liang-Chia Chen, Tien-Tung Chung, Fu-Cheng Wang
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2020)
Proceedings Paper
Engineering, Electrical & Electronic
Guo-Wei Wu, Ming-Jun Jiang, Liang-Chia Chen
APPLIED OPTICAL METROLOGY III
(2019)
Proceedings Paper
Engineering, Electrical & Electronic
Guo-Wei Wu, Ming-Jun Jiang, Liang-Chia Chen
APPLIED OPTICAL METROLOGY III
(2019)
Proceedings Paper
Engineering, Industrial
Johannes Belkner, Hsiu-Wen Liu, Eberhard Manske, Liang-Chia Chen
OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XI
(2019)
Article
Engineering, Mechanical
Liang-Chia Chen, Ching-Wen Liang, Xuan-Loc Nguyen, Shyh-Tsong Lin
JOURNAL OF THE CHINESE SOCIETY OF MECHANICAL ENGINEERS
(2019)
