A low temperature fabrication of HfO2 films with supercritical CO2 fluid treatment

Published 2008 View Full Article

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Title
A low temperature fabrication of HfO2 films with supercritical CO2 fluid treatment
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 7, Pages 074108
Publisher
AIP Publishing
Online
2008-04-08
DOI
10.1063/1.2844496

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