Low temperature atomic layer deposition of titania thin films

标题
Low temperature atomic layer deposition of titania thin films
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 12, Pages 3182-3189
出版商
Elsevier BV
发表日期
2009-09-17
DOI
10.1016/j.tsf.2009.09.010

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