Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 85, Issue 10, Pages 2059-2063

出版商

Elsevier BV

发表日期

2008-06-04

DOI

10.1016/j.mee.2008.05.026

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